Capacitive Micromachined Ultrasound Transducers (CMUTs) Enabling Advanced 3-D Imaging


Butrus T. Khuri Yakub

(Stanford University)

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Date: 04/05/2012


The advent of silicon micromachining enables the realization of the full potential of these transducers and provides performance that makes CMUTs competitive and superior to piezoelectric transducers. In immersion applications, CMUTs are possible with fractional bandwidth of over 100 %, an electromechanical coupling coefficient close to unity; are made in the form of single element or one‐dimensional (1D) or two‐dimensional (2D) arrays of tens of thousand of elements, as well as annular arrays. They have been operated in the frequency range of 100 kHz to 50 MHz, and included in systems with a dynamic range of the order of 150 dB/V/Hz. Custom electronics have been developed and integrated with arrays of transducers to form compact imaging catheters. This presentation will first review the operation of CMUTs, the technology used to make them, and applications in medical imaging.

Created: Thursday, April 5th, 2012